Formation of Nanocolumnar Structures under Magnetron Growth of Europium-oxide-doped Carbon Nitride Films

Abstract

The atomic force microscopy is used to study surface morphology of carbon nitride CNx and europium-oxide-doped carbon nitride CNx:EuyOz films prepared by a direct-current magnetron. A clear correlation between the growth parameters and the resulting film structure is observed. It is established that the presence of a rare earth metal oxide leads to a structural ordering of the film surface. The self-organization processes within the films are investigated. Luminescence spectra and luminescence bands of europium-oxide-doped films are obtained.